Microlithography : process technology for IC fabrication / David J. Elliott.
By: Elliott, David J [author]
Language: English Publisher: New York : McGraw-Hill, c1986Description: xix, 378 pages : illustrations ; 24 cmContent type: text Media type: unmediated Carrier type: volumeISBN: 0070193045 :; 9780070193048Subject(s): Integrated circuits -- Very large scale integration -- Design and construction | Microlithography | PhotoresistsDDC classification: 621.381/73 LOC classification: TK7874 | .E495 1986| Item type | Current location | Home library | Call number | Copy number | Status | Date due | Barcode | Item holds |
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BOOK
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COLLEGE LIBRARY | COLLEGE LIBRARY SUBJECT REFERENCE | 621.381/73 El58 1986 (Browse shelf) | c.1 | Available | CITU-CL- 14035 | ||
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BOOK
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COLLEGE LIBRARY | COLLEGE LIBRARY SUBJECT REFERENCE | 621.381/73 El58 1986 (Browse shelf) | c.2 | Available | CITU-CL- 14036 |
Total holds: 0
Includes bibliographies and index.
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