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Elliott, David J.

Microlithography : process technology for IC fabrication / David J. Elliott. - xix, 378 pages : illustrations ; 24 cm.

Includes bibliographies and index.

ISBN: 0070193045 : $42.00 9780070193048

LCCN: 85018196

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photoresists.

LC Class. No.: TK7874 / .E495 1986

Dewey Class. No.: 621.381/73