Ion implantation, sputtering and their applications / by P.D. Townsend, J.C. Kelly, N.E.W. Hartley.

By: Townsend, P. D. (Peter David) [author]
Contributor(s): Kelly, J. C. (John Clive) [author.] | Hartley, N. E. W [author.]
Language: English Publisher: London ; Academic Press, 1976Description: ix, 333 pages : illustrations ; 24 cmContent type: text Media type: unmediated Carrier type: volumeISBN: 0126969507; 9780126969504Report number: 75196983Subject(s): Ion implantation | Sputtering (Physics)Additional physical formats: Online version:: Ion implantation, sputtering and their applications.DDC classification: 537.56 LOC classification: QC702.7.I55 | T67
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Item type Current location Home library Call number Status Date due Barcode Item holds
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SUBJECT REFERENCE
537.56 T665 1976 (Browse shelf) Available CITU-CL-19821
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Includes bibliographical references and index.

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