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Townsend, P. D.

Ion implantation, sputtering and their applications / by P.D. Townsend, J.C. Kelly, N.E.W. Hartley. - ix, 333 pages : illustrations ; 24 cm.

Includes bibliographical references and index.

ISBN: 0126969507 9780126969504

Source: �13.00

LCCN: 75196983

Nat. Bib. No.: B7625089 GB7625089 bnb

Subjects--Topical Terms:
Ion implantation.
Sputtering (Physics)

LC Class. No.: QC702.7.I55 / T67

Dewey Class. No.: 537.56

Universal Decimal Class. No.: 537.56 / T749 537.56.T75 539.2:539.1.04 539.1.04:539.2

Report. No.: 75196983