| 000 | 01144pam a2200349 a 4500 | ||
|---|---|---|---|
| 999 |
_c94151 _d94151 |
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| 001 | 3332816 | ||
| 003 | CITU | ||
| 005 | 20260205095946.0 | ||
| 008 | 260205b ||||| |||| 00| 0 eng d | ||
| 010 | _a 85018196 | ||
| 020 |
_a0070193045 : _c$42.00 |
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| 020 | _a9780070193048 | ||
| 035 | _a3332816 | ||
| 040 |
_aCITU LRAC _cDLC _dDLC _beng |
||
| 041 | _aeng | ||
| 050 | 0 | 0 |
_aTK7874 _b.E495 1986 |
| 082 | 0 | 0 |
_a621.381/73 _219 |
| 100 | 1 |
_aElliott, David J. _eauthor |
|
| 245 | 1 | 0 |
_aMicrolithography : _bprocess technology for IC fabrication / _cDavid J. Elliott. |
| 264 | 1 |
_aNew York : _bMcGraw-Hill, _cc1986. |
|
| 300 |
_axix, 378 pages : _billustrations ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 504 | _aIncludes bibliographies and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration _xDesign and construction. |
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| 650 | 0 | _aMicrolithography. | |
| 650 | 0 | _aPhotoresists. | |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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