| 000 | 01216cam a2200361 a 4500 | ||
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| 999 |
_c94132 _d94132 |
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| 001 | 4733182 | ||
| 003 | CITU | ||
| 005 | 20260130172155.0 | ||
| 008 | 260130b ||||| |||| 00| 0 eng d | ||
| 010 | _a 84019122 | ||
| 020 |
_a0122341104 _qalk. paper |
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| 020 |
_a9780122341106 _q(alk. paper) |
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| 035 | _a4733182 | ||
| 040 |
_aCITU LRAC _cDLC _dDLC _beng |
||
| 041 | _aeng | ||
| 050 | 0 | 0 |
_aTK7874 _b.V56 vol. 10 |
| 082 | 0 | 0 |
_a621.3819/5835 s _a621.3819/5835 _219 |
| 245 | 0 | 0 |
_aSurface and interface effects in VLSI / _cedited by Norman G. Einspruch, Robert S. Bauer. |
| 264 | 1 |
_aOrlando : _bAcademic Press, _c1985. |
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| 300 |
_axii, 383 pages : _billustrations ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 440 | 0 |
_aVLSI electronics ; _vv. 10 |
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| 504 | _aIncludes bibliographies and index. | ||
| 650 | 0 |
_aIntegrated circuits _xVery large scale integration. |
|
| 650 | 0 |
_aSemiconductors _xSurfaces. |
|
| 700 | 1 | _aEinspruch, Norman G. | |
| 700 | 1 | _aBauer, Robert S. | |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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