| 000 | 01047nam a22003017a 4500 | ||
|---|---|---|---|
| 999 |
_c47482 _d47482 |
||
| 003 | CITU | ||
| 005 | 20230308105217.0 | ||
| 008 | 191017b ||||| |||| 00| 0 eng d | ||
| 020 | _a9781641720052 | ||
| 040 | _ccitu | ||
| 041 | _aeng. | ||
| 082 |
_223 _a621.381 |
||
| 245 |
_aMicroelectromechanical systems : _bconcepts, design and analysis/ _c[edited by] Barkley Sparks |
||
| 264 |
_aNew York, NY: _bLarsen & Keller, _c2019 |
||
| 300 |
_aviii, 253 pages : _bcolor illustrations ; _c26 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 440 | _aTextbook series. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 526 |
_a600-699 _b620 |
||
| 650 | _aMicroelectromechanical systems. | ||
| 650 |
_aMicroelectromechanical systems _xDesign and construction. |
||
| 650 | _aMicroelectromechanical devices. | ||
| 650 | _aMicrotechnology. | ||
| 700 |
_aSparks, Barkley, _eeditor. |
||
| 942 |
_2ddc _cBK _h621.381 M5836 2019 |
||