TY  - BOOK
AU  - Einspruch,Norman G.
AU  - Bauer,Robert S.
TI  - Surface and interface effects in VLSI
SN  - 0122341104
AV  - TK7874 .V56 vol. 10
U1  - 621.3819/5835 s621.3819/5835 19
PY  - 1985///
CY  - Orlando
PB  - Academic Press
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Semiconductors
KW  - Surfaces
N1  - Includes bibliographies and index
ER  -