Surface and interface effects in VLSI / 
edited by Norman G. Einspruch, Robert S. Bauer. 
 - xii, 383 pages :  illustrations ;  24 cm. 
 - VLSI electronics ;  v. 10 .
<br/><br/>Includes bibliographies and index. 
<br/><br/><label>ISBN: </label>0122341104 9780122341106 
<br/><br/><label>LCCN: </label>84019122  
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Very large scale integration.<br/>Semiconductors--Surfaces.
<br/><br/><label>LC Class. No.: </label>TK7874  / .V56 vol. 10 
<br/><br/><label>Dewey Class. No.: </label>621.3819/5835 s  621.3819/5835