TY - BOOK AU - Septier,Albert L. TI - Applied charged particle optics SN - 0120145731 AV - QC793.5.E622 A66 U1 - 537.5 19 PY - 1980///-1983 CY - New York PB - Academic Press KW - Electron optics N1 - Vol. 3 has subtitle: Very-high-density beams; Includes bibliographies and indexes ER -