Applied charged particle optics / edited by A. Septier. - 3 v. : illustrations ; 24 cm. - Advances in electronics and electron physics. Supplement ; 13 .

Vol. 3 has subtitle: Very-high-density beams.

Includes bibliographies and indexes.

0120145731 9780120145737

80138017


Electron optics.

QC793.5.E622 / A66

537.5