Townsend, P. D.
Ion implantation, sputtering and their applications /
by P.D. Townsend, J.C. Kelly, N.E.W. Hartley.
- ix, 333 pages : illustrations ; 24 cm.
Includes bibliographical references and index.
0126969507 9780126969504
�13.00
75196983
B7625089 GB7625089 bnb
Ion implantation.
Sputtering (Physics)
QC702.7.I55 / T67
537.56
537.56 / T749 537.56.T75 539.2:539.1.04 539.1.04:539.2
75196983