TY  - BOOK
AU  - Sparks, Barkley,
TI  - Microelectromechanical systems : : concepts, design and analysis
SN  - 9781641720052
U1  - 621.381 23
PY  - 2019///
CY  - New York, NY
PB  - Larsen & Keller
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Microelectromechanical devices
KW  - Microtechnology
N1  - Includes bibliographical references and index; 600-699; 620
ER  -