Microelectromechanical systems :   concepts, design and analysis/ 
[edited by] Barkley Sparks 
 - viii,  253 pages :  color illustrations ;  26 cm. 
 - Textbook series. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/>
<br/><br/><label>ISBN: </label>9781641720052 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectromechanical systems--Design and construction.<br/>Microelectromechanical devices.<br/>Microtechnology.
<br/><br/><label>Dewey Class. No.: </label>621.381