| 000 -LEADER |
|---|
| fixed length control field |
01521cam a2200313 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
15956240 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
CITU |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20201103065230.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
091022s2010 nyua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
2009040456 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780071626231 (alk. paper) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0071626239 (alk. paper) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocn277205716 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
YDX |
| -- |
BWX |
| -- |
OKU |
| -- |
DLC |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7875 |
| Item number |
.A378 2010 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381046 |
| Edition number |
22 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advanced MEMS packaging / |
| Statement of responsibility, etc. |
John H. Lau ... [et al.]. |
| 246 3# - VARYING FORM OF TITLE |
|---|
| Title proper/short title |
Advanced microelectromechanical systems packaging |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York : |
| Name of publisher, distributor, etc. |
McGraw-Hill, |
| Date of publication, distribution, etc. |
c2010. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxiii, 552 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronic packaging. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lau, John H. |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
orignew |
| d |
1 |
| e |
ecip |
| f |
20 |
| g |
y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
|
| Koha item type |
BOOK |