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Elliott, David J.

Integrated circuit fabrication technology / by David J. Elliott. - Second edition - xvi, 540 pages : illustrations ; 23 cm.

Includes bibliographies and index.

ISBN: 0070193398 9780070193390

Subjects--Topical Terms:
Integrated circuits--Design and construction.

LC Class. No.: TK7874 / .E49

Dewey Class. No.: 621.381/73