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Surface and interface effects in VLSI / edited by Norman G. Einspruch, Robert S. Bauer. - xii, 383 pages : illustrations ; 24 cm. - VLSI electronics ; v. 10 .

Includes bibliographies and index.

ISBN: 0122341104 9780122341106

LCCN: 84019122

Subjects--Topical Terms:
Integrated circuits--Very large scale integration.
Semiconductors--Surfaces.

LC Class. No.: TK7874 / .V56 vol. 10

Dewey Class. No.: 621.3819/5835 s 621.3819/5835