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Ruska, W. Scot

Microelectronic processing : an introduction to the manufacture of integrated circuits / W. Scot Ruska. - xviii, 430 pages : illustrations ; 25 cm. - McGraw-Hill series in electrical engineering .

Includes bibliographies and index.

ISBN: 0070542805 0070542813 9780070542808 9780070542815

LCCN: 86015362

Subjects--Topical Terms:
Integrated circuits--Design and construction.

LC Class. No.: TK7874 / .R87 1988

Dewey Class. No.: 621.381/73